Abstract
Piezoresistive silicon based process monitoring devices (PMDs) employing flexible circuitry and substrates have been developed which are compatible with standard VLSI fabrication processes. These solid state sensors offer cost effective batch fabrication and a high degree of uniformity to produce either single elements or flexible conformable arrays. This is a state of the art report on emerging technology.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.