Abstract
Silicon photonic biosensors are highly attractive for multiplexed Lab-on-Chip systems. Here, we characterize the sensing performance of 3 µm TE-mode and 10 µm dual TE/TM-mode silicon photonic micro-disk resonators and demonstrate their ability to detect the specific capture of biomolecules. Our experimental results show sensitivities of 26 nm/RIU and 142 nm/RIU, and quality factors of 3.3x10(4) and 1.6x10(4) for the TE and TM modes, respectively. Additionally, we show that the large disks contain both TE and TM modes with differing sensing characteristics. Finally, by serializing multiple disks on a single waveguide bus in a CMOS compatible process, we demonstrate a biosensor capable of multiplexed interrogation of biological samples.
Highlights
Silicon photonics shows promise towards revolutionizing label-free biosensing and medical diagnostics [1]
Photonic devices leveraging the silicon-on-insulator (SOI) platform can be used as sensors tuned to specific biological applications, and are readily fabricated into highly multiplexed systems for integration with microfluidics and electronics for Lab on Chip (LoC) systems
The change in modal effective index resulting from small changes in the refractive index in the cladding has been demonstrated [17] to be a function of the overlap integral between the electric field intensity and the changes occurring in the refractive index of the cladding over the full range of the mode cross-section
Summary
Silicon photonics shows promise towards revolutionizing label-free biosensing and medical diagnostics [1]. Many types of SOI photonic biosensors including strip [6, 7] and slot waveguide ring resonators [8, 9], disk resonators [10,11,12,13], photonic crystals [14, 15], and Bragg gratings [2, 16], operate by sensing refractive index changes (induced by bulk solution changes or molecular binding events) in the waveguide cladding These refractive index changes modify the modal effective index (neff), and for resonant sensors it results in a resonance wavelength (λres) shift. To map the changes in effective index to changes in resonance wavelength, one can use the resonance equation [6]: λres
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