Abstract

Thanks to advanced semiconductor microfabrication technology, chip-scale integration and miniaturization of lab-on-a-chip components, silicon-based optical biosensors have made significant progress for the purpose of point-of-care diagnosis. In this review, we provide an overview of the state-of-the-art in evanescent field biosensing technologies including interferometer, microcavity, photonic crystal, and Bragg grating waveguide-based sensors. Their sensing mechanisms and sensor performances, as well as real biomarkers for label-free detection, are exhibited and compared. We also review the development of chip-level integration for lab-on-a-chip photonic sensing platforms, which consist of the optical sensing device, flow delivery system, optical input and readout equipment. At last, some advanced system-level complementary metal-oxide semiconductor (CMOS) chip packaging examples are presented, indicating the commercialization potential for the low cost, high yield, portable biosensing platform leveraging CMOS processes.

Highlights

  • Medical diagnostics have come to play a critical role in healthcare by providing early detection and diagnosis of disease [1], improving timely and appropriate care [2], protecting the safety of medical products such as blood for transfusion [3], and reducing healthcare costs [4]

  • For an evanescent field label-free biosensor, detection limits (DLs) can be specified in three units: (i) DL in units of refractive index units (RIU) aims to characterize the sensing capability in bulk solution, which offers a rough comparison among different sensors; (ii) DL in units of pg/mm2 aims to characterize the sensing capability at sensor’s surface by using surface mass density; and (iii) DL in units of ng/mL

  • In 2013, Fard et al fabricated and characterized the strip-waveguide based phase-shifted Bragg grating in the SOI platform, and the Q-factor was measured to be 27,600, which led to a experimental intrinsic detection limit (iDL) of 9.3 × 10−4 RIU [115]

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Summary

Introduction

Medical diagnostics have come to play a critical role in healthcare by providing early detection and diagnosis of disease [1], improving timely and appropriate care [2], protecting the safety of medical products such as blood for transfusion [3], and reducing healthcare costs [4]. The enzyme-linked immunosorbent assay (ELISA), which has been the gold-standard method in biomarker detection and validated for more than 40 years, can obtain an ultra-low detection limit (∼1 pM) [6] This method is based on a label-based approach which delays results, adds to costs due to specialized reagent requirements, and needs complex micro-evaluations using large, automated analyzers. The development of practical biosensors is one of the most promising approaches to satisfy the growing demand for effective medical diagnostic technologies [7]. Examples of some state-of-the-art packaged on-CMOS sensing platforms are reported, showing a promising prospect for the development of fully integrated, portable, lab-on-a-chip biosensing architectures for multiplexed label-free diagnostics

Evanescent Field Sensing Principle
Interferometer Based Biosensors
Resonant Microcavity Based Biosensors
Photonic Crystal Based Biosensors
Bragg Grating Based Biosensors
Section Summary
Performance-Improving Strategies
Transverse Magnetic Mode
Slot Waveguides
Thinner Waveguides
Suspended Waveguides
Sub Wavelength Grating Waveguides
Vernier Effect Based Systems
Sensitivities Comparison
Label-Free Detection
Optical Sensing System Integration
Optofluidic Integration
Optoelectronic Integration
On-Chip Lasers
On-Chip Detectors
Readout
State-Of-The-Art CMOS-Chip Packaging
Findings
Conclusions
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