Abstract

In this paper, we present an overview of silicon nanocrystals memories. Silicon nanocrystals are as storage nodes in these memories. These devices show promising characteristics as candidates for future deep-submicron non-volatile memories. The structure and fabrication of these devices are explained at first. Then the size, density, and emission of silicon nanocrystals in nanocrystal memory device are considered. Finally, a FinFET silicon nanocrystal memory is introduced as a practical sample.

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