Abstract
A silicon-based polarization-insensitive optical filter is proposed and demonstrated. For the present on-chip polarization-insensitive optical filter, there is a dual-polarization mode (de)multiplexer, a TE-type multimode waveguide grating (MWG) with triangular corrugations and a TM-type MWG with rectangular corrugations. Here the triangular corrugations are introduced to reduce the undesired reflection and suppress the Fabry-Parot resonance. Furthermore, lateral-shift apodization is introduced for both two types of MWGs to suppress the sidelobes. For the fabricated device, the measured 3 dB-bandwidth is as large as ∼11 nm and the excess loss is ∼1.5 dB for both polarizations, while the sidelobe suppression ratios are 23 dB and 17 dB for TE and TM polarizations, respectively.
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