Abstract
The first demonstration of a silicon-based metal–insulator–semiconductor (MIS) nanoplasmonic disc resonator monolithically integrated on a CMOS compatible platform is presented. The nanoplasmonic disc resonator is integrated with Au/SiO2/Si MIS nanoplasmonic waveguides and conventional silicon-on-insulator photonic waveguides. The device has a high plasmonic quality (Q) factor of 82.3, one of the highest reported for an integrated silicon-based nanoplasmonic device, with a compact device footprint of only 4 µm2.
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