Abstract
In order to diagnose acute myocardial infraction (AMI) quickly by detection of cTnI, silicon nanowire (Si-NW) transistor is chosen to be the bio-sensor. We demonstrate Si-NW biosensors coated with different dielectric materials to detect cTnI. Based on the experimental results of 14nm SiO2 and 28nm SiO2, it is found that high capacitance dielectrics contribute better sensitivity than that of low capacitance dielectrics. In addition, high-k material dielectrics stacked with ultrathin SiO2 sensing membrane structures are used for Al2O3 and HfO2 because SiO2 has better compatibility with 3-Aminopropyltriethoxysilane (APTES). The results show that high-k stacked structure improve the sensitivity. Based on this work, the proposed Si-NW biosensor structure is experimentally demonstrates a good potential for future applications in cTnI detections.
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