Abstract
The penetration of micro-electronics into new markets is seriously hampered by the lack of efficient, low-cost sensors. It is not surprising therefore to find that these devices are the subject of research in many laboratories. This paper gives a review of the most important sensors which are fabricated in silicon planar or hybrid technology. The review is preceded by some general considerations with respect to measurement systems and signal conversion.
Highlights
Information-processing systems consist of a central signal processor plus input and output transducers which interface to the non-electronic environment (Figure 1)
In the signal processor often called modifier this electronic signal is in some way modified, e.g. amplified, filtered or converted from an analog to a digital signal
In the output transducer either the electronic signal is again converted into a signal which can be perceived by one of our senses or it is used to cause some action, e.g. to print a character or to close a valve
Summary
Information-processing systems consist of a central signal processor plus input and output transducers which interface to the non-electronic environment (Figure 1). In the input transducer -often called sensor- a measurand such as temperature, displacement, concentration, switch position, etc., is converted into an electronic signal. As a result of this activity we have at present at our disposal a large number of very sophisticated micro-electronic building blocks such as microprocessors, microcomputers, A/D converters, voltage/frequency converters, operational amplifiers, etc. All these components are characterized by an unprecendented performance/price ratio. Through thick- and thin-film technology a large number of useful and innovative sensors have been fabricated in recent decades.
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