Abstract
The reactions between platinum and hydrogenated amorphous silicon (a-Si:H) films have been studied by transmission electron microscopy, selected area diffraction, X-ray photoelectron spectroscopy and IR absorption analysis. It was found that, contrary to the case of the Pt/Si system, the Pt 3Si phase grew as the first silicide phase at the interface between the platinum and a-Si:H films. The reactions from Pt 3Si to Pt 2Si and from Pt 2Si to PtSi occurred before the platinum phase was completely consumed, and at lower temperatures than in the Pt/Si system. These characteristics observed in the Pt/a-Si:H system could be related to the surface morphology of the a-Si:H film and the existence of hydrogen evolved from a-Si:H film as an impurity in the platinum film.
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