Abstract
We report new high quality factor (Q) integrated GHz magnetic inductors based on solenoid structures with FeGaB/Al2O3 multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies over their air core counterparts. These inductors show an excellent high-frequency performance with a wide operation frequency range 0.5-2.5 GHz, in which the inductance is flat and the peak quality factor can reach ~20. The inductance of the magnetic inductor shows >100% enhancement compared with that of the same size air core inductor. These novel GHz inductors with high inductance and Q enhancement show great promise for applications in radio frequency integrated circuits.
Published Version
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