Signal detection and imaging methods for MEMS electron microscope

Abstract

In the paper, new detection methods that can be used to detect signals in a miniature MEMS (Micro-Electro-Mechanical System) electron microscope were presented. The methods were designed to fit the structure of the developed MEMS microscope, equipped with an electron-optical microcolumn and a scanning system based on an octupole deflector. In the experiments carried out, imaging was performed using a system of three silicon detectors placed above, below, and at the sample level and integrated with the octupole deflection system. Measurements were carried out under different pressure conditions (vacuum and atmospheric pressure) and for different detector bias voltage and electron beam energy. Good quality images were obtained using all three detectors, both in vacuum and in air. The results presented indicate that in the final implementation of the MEMS electron microscope, all three detection systems can be successfully incorporated.