Abstract
Highly stable SiCN ceramic patterns on Si substrates with dimensions on the sub-micron scale were fabricated with a liquid ceramic precursor and economic nanoscale CD and DVD masters using two soft lithography techniques, modified imprint lithography and micromolding in capillaries (MIMIC). The soft or hard PDMS mold transferred from the masters was used to fabricate the cured polymer patterns at 70–90°C. The patterns were then converted to a ceramic phase by pyrolysis at 800°C in a nitrogen atmosphere. The patterning capability of the two lithographic techniques was compared using atomic force microscopy and scanning electron microscopy observations of the masters, molds, preceramic polymer and ceramic patterns. The relative merits of the two lithographic techniques for ceramic patterning are reported.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
