Abstract
An Nd:YAG pulsed laser was employed to irradiate different gas-puff targets. The interaction gives rise to the emission of soft X-ray (SXR), ultraviolet and extreme ultraviolet (EUV) radiation useful for X-ray microscopy. A Silicon Carbide (SiC) and a Si detector were employed to characterize the photon plasma emission of different gases in different wavelength ranges. The EUV and SXR measurements with different filters show the applicability of SiC detectors for plasma monitoring and characterization. Detector linearity, plasma evolution over the time and the relative intensity signal of both detectors will be presented and discussed.
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