Si Nanoparticle Synthesis and Self – Organization

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ABSTRACTSi nanoparticle linear arrays have been produced by pulsed KrF laser irradiation in inert atmospheres. The Si nanoparticles have a Gaussian size distribution with a mean diameter of 2.9 nm and a FWHM of 2 nm. The self – organized lines are spaced at a distance approximately equal to the laser beam wavelength, λ. The evolution of this self – organization process and that of laser – induced periodic surface structures (LIPSS) are closely related. The nanoparticles scatter light that interferes with the incident light. Similar to LIPSS, the inhomogeneous deposition of laser light due to this interference pattern created at the surface drives the particle formation and clustering. A detailed study of the clustering formation as a function of the laser pulses is presented.