Abstract

The normal operation of LLL's Argus and Shiva laser irradiation facilities demand a main vacuum system for the target chamber and a separate local vacuum system for each of the larger appendage dianostics. This paper will describe the Argus and Shiva main vacuum systems, their respective auxiliary vacuum systems and the individual diagnostics with their respective special vacuum requirements and subsequent vacuum systems. Our latest approach to automatic computer-controlled vacuum systems will be presented.

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