Abstract
Grating interferometers are very attractive tools to perform at-wavelength metrology as they are able to measure wavefront gradients with tens of nanoradians accuracy and with a low sensitivity to mechanical vibrations. However, when performing hard-X-ray at-wavelength metrology on reflective optics additional effort is needed to compensate for the reduction of spatial resolution caused by the grazing incidence angle of the probe. As the shear effect may limit the accessible detectable frequencies, special care must be taken on the choice of the working Talbot order in order to find the best compromise between sensitivity, robustness to noise and spatial resolution.
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