Abstract
In recent years, X-ray phase sensing technology has been widely used in at-wavelength metrology and optical characterization. One of the latest developments is the technology based on X-ray speckle. It has attracted wide attention because of its simple and flexible experimental arrangement, high-cost performance, multi-mode, and high angular sensitivity. The speckle-based technique can precisely measure the wavefront and associated aberrations and is therefore a suitable device for in-situ metrology. Shanghai Synchrotron Radiation Facility (SSRF) has been implemented and further improved such a technique. We have demonstrated that the speckle-based technique can be used in the wavefront measurement of the reflective and transmissive optics and diffraction optics such as mirrors, lens, and crystals. This paper will introduce the latest developments in speckle-based wavelength measurement technology and some application examples at SSRF.
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