Abstract
We show that the use of fiber overtone resonance modes up to 3 MHz for shear-force distance control has two advantages for near-field microscopy. The higher dither frequency allows a shorter feedback loop time delay, which in turn allows scanning speeds of 100 μm/s on a sample with, for example, a 150 nm height variation over a 1 μm distance. Experiments on a hard semiconductor device and on a soft polymer sample demonstrate a factor of 5 improvement in scanning speed when the dither frequency is increased by a factor of 20. The second advantage is a reduction of the minimum lateral force required for height regulation, which is important for soft samples. Modeling the piezoelectric detection system as a harmonic oscillator indicates a factor of 33 increase in lateral force sensitivity when using the third overtone resonance of a typical fiber tip. This result is confirmed experimentally by immersing the tip into water.
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