Shape transitions and island nucleation for Si/Ge molecular beam epitaxy on stripe-patterned Si (001) substrate

Abstract

Si and Ge growth on the stripe patterned Si (001) substrates is studied using scanning tunneling microscopy. During Si buffer growth, the stripe morphology rapidly evolves from multifaceted ''U'' to ''V''-shaped forms. This involves successive transitions between different low energy (11n) side facets, where n continuously decreases from n=3 to 20. Ge growth on such stripes induces the formation of a pronounced side wall ripple structure when the Ge thickness exceeds three monolayers. This ripple structure consists of alternating (105) microfacets oriented perpendicularly to the stripes. Depending of the side wall geometry, Ge nanoislands subsequently nucleate either on the side walls or at the bottom of grooves. The latter only occurs for ''V''-shaped stripes, where the side wall ripples extend all the way from the top to the bottom of the grooves, allowing efficient downward mass transport. For multifaceted ''U'' stripes, the side wall ripples are interrupted by steeper side wall segments such that mounds and subsequently, pyramids and domes grow on the side walls instead of at the bottom of the grooves. The island shapes strongly depend on their position on the pattern topography, which also affects the critical coverage for island nucleation as well as for the transitionmore » from pyramids to domes. The mechanisms for nucleation at different positions are clarified by detailed analysis and the role of kinetic as well as energetic factors identified.« less