Abstract
The implanting voltage, gas pressure and the grid electrode radius arethe key parameters influencing the surface grid shadow effect that hasbeen observed in our grid-enhanced plasma source ion implantationexperiment. To reduce the shadow effect and obtain a correspondingbetter implantation uniformity of sample surfaces, we need to use lowerimplanting voltage, higher gas pressure and smaller grid radius.Furthermore, we apply an axial magnetic field to increase the plasmadensity inside the tube and to mix the plasma outside the grid, so thatthe shadow effect of sample surfaces can be weakened.
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