Abstract
Carbon nanotubes (CNTs) were deposited on barium titanate (BaTiO3) substrates using the microwave plasma jet chemical vapor deposition (MPJCVD) system. Accelerometer sensors were then made of both as-obtained carbon ceramic (CNTs/BaTiO3) composite materials and barium titanate (BaTiO3). The variations of the output voltages under various accelerating amplitudes were examined on two kinds of sensors at vibrating frequencies of 200Hz, 500Hz, 800Hz, and 2000Hz, respectively. It is found that the output voltages and the sensitivity of CNTs/BaTiO3 sensors were higher than those of BaTiO3 sensors at each vibrating frequency.
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