Abstract
AbstractPhotofabrication developed for integrated circuits can be used to fabricate sensors with three‐dimensional structures and devices with many other types of structures. The micromachining technology is useful in forming a small‐sized, high‐performance sensor system. Using this technology, it is possible to form a system with a sensor, actuator, and electronic circuit on a silicon wafer.A thermo‐flow sensor was fabricated with two microheaters to detect small gas flow. It was found that this device was sensitive to detect an extremely low gas flow with high linearity. This flow sensor was used for an integrated mass‐flow controller and as an integrated magnetic oxygen sensor.An integrated capacitive pressure sensor also was developed with a capacitive detection circuit. The new feed‐through structure used for this sensor was used for other integrated sensors such as a tactile imager.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Electronics and Communications in Japan (Part II: Electronics)
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
