A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

Wei Xu,Jeffry Wicaksana,Ruijin Wang,Amine Bermak,Nicholas Xuanlai Fang,A Min,Moaaz Ahmed,Beiqi Lijin,Yi-Kuen Lee,Mingzheng Duan,Xiaoyi Wang

doi:10.1109/memsys.2018.8346682

A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

Wei Xu, Jeffry Wicaksana + Show 9 more

https://doi.org/10.1109/memsys.2018.8346682

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Publication Date: Jan 1, 2018

Citations: 22

Affiliation: Hong Kong University of Science and Technology, University of Hong Kong, Hangzhou Dianzi University, Hamad bin Khalifa University, Massachusetts Institute of Technology

#Flow Sensor #Flow Sensor System + Show 8 more

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Abstract

In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N 2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.

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