Sensorless enhancement of an atomic force microscope micro-cantilever quality factor using piezoelectric shunt control

Abstract

The image quality and resolution of the Atomic Force Microscope (AFM) operating in tapping mode is dependent on the quality (Q) factor of the sensing micro-cantilever. Increasing the cantilever Q factor improves image resolution and reduces the risk of sample and cantilever damage. Active piezoelectric shunt control is introduced in this work as a new technique for modifying the Q factor of a piezoelectric self-actuating AFM micro-cantilever. An active impedance is placed in series with the tip oscillation voltage source to modify the mechanical dynamics of the cantilever. The benefit of using this control technique is that it removes the optical displacement sensor from the Q control feedback loop to reduce measurement noise in the loop and allows for a reduction in instrument size.