Quality factor enhancement of an Atomic Force Microscope micro-cantilever using piezoelectric shunt control

Abstract

The quality (Q) factor of the Atomic Force Microscope (AFM) micro-cantilever influences both the maximum scan speed and image quality when operating in tapping mode. Increasing the Q factor of the micro-cantilever results in an increase in force sensitivity and a reduction in tapping force. Active piezoelectric shunt control uses an active electrical impedance to modify the mechanical dynamics of the cantilever. An increase in the effective Q factor of a piezoelectric AFM micro-cantilever by over 25 times has been demonstrated using this technique.