Year-end Sale % OFF 
Abstract
This paper aims to put forward a detailed sensitivity analysis of an in-plane MEMS gyroscope with respect to various performance criteria that are very critical for use of the sensor in different applications ranging from platform stabilization to micro UAVs. Sensitivity analysis involves selecting key design parameters and critical performance criteria and studying the effect of variation of each design parameter on each of the performance criteria. The five key design parameters of the MEMS gyro are the drive stiffness kd, sense stiffness ks, drive mass md, sense mass ms and the sense damping coefficient Cs. The four critical gyro performance criteria selected are scale factor, bandwidth, resolution and dynamic range. The influence of variations in different geometric dimensions of the structure on the design parameters of the gyro is also established. The critical geometric dimensions are identified that are then suitably modified allowing faster convergence of the design to meet the desired performance specifications. This study is relevant on two counts (1) the fine tuning of the design to meet all the desired performance criteria with minimum variation in geometric dimensions and with no change in the footprint of the sensor die and (2) the influence of geometric dimensional variations induced during the fabrication of the MEMS gyro structure.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
