Abstract
Semiconductor Process and Device Modeling is a senior/graduate level course on the application of simulation tools for design and verification of microelectronic processes and operation of semiconductor devices. The goal of the course is to provide a more in-depth understanding of complex processes and device physics through the use of simulation tools. Silvaco-SUPREM (Athena/Atlas) is the primary process and device simulation tool used throughout the course. The course explores the various models that are used for front-end silicon processes, emphasizing the importance of complex interactions and 2-D effects as devices are scaled deep-submicron. Electrical device simulation and parameter extraction provides a study on how changes in the device structure can influence device operation. The investigation continues to the circuit level through modifications of SPICE model parameters and analog circuit simulation.
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