Abstract

In this work, we have investigated the structural, optical and electrical properties of rare earth co-doped zinc oxide thin films prepared by spray pyrolysis technique. X-ray diffraction has shown that the films are polycrystalline and textured with the c -axis of the wurtzite structure along the growth direction. Scanning electronic microscopy and transmission electronic microscopy were used to study the films composition and morphology. Photoluminescence measurements showed that all the films have a strong emission band at around 380 nm. Layers with electrical resistivity values as low as 5.7 × 10 −2 Ω cm were obtained.

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