Abstract
Various microsystems applications incorporate piezoresistive sensing elements employed to translate mechanical stress into electrical readout. The piezoresistive sensitivity of such devices is of fundamental importance as it defines the range of detectable deflection or force change. Availability of closed-form analytical models is the most efficient means for fast and reliable MEMS structural design and optimization. This work presents a closed-form model of piezoresistive sensitivity for micromachined cantilevers working in longitudinal deformation mode.
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