Abstract
This paper attempts to describe a new type of self-excited force-sensing microcantilever for dynamic scanning force microscopy (SFM). The new microcantilevers have two piezoelectric ZnO layers on an SiO 2 film. The upper piezoelectric layer is utilized for exciting the lever and detecting the lever displacement, whereas the lower layer is utilized for controlling the tip-sample spacing. We have fabricated experimental two-layer piezoelectric microcantilevers and characterized them by measuring the frequency dependence of the admittance. In effect, we have successfully constructed a dynamic SFM without the external oscillator and detector with a resolution of less than 0.3 nm at a bandwidth of 125 Hz. The microcantilever can be statically driven by applying d.c. voltages to the lower piezoelectric layer, where the sensitivity of static drive is 4–6 nm V −1.
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