Abstract
Abstract A dynamic scanning force microscope using a piezoelectric force sensor has been constructed. The complexity of the conventional dynamic SFM is due to the detector used for measuring the vibration amplitude of the cantilever. Our sensor enables direct detection of signals related to the lever amplitude by a piezoelectric layer formed on the lever. The sensor is a composite cantilever, which has a piezoelectric thin film layer sandwiched between electrode metals on a thermal SiO 2 microbeam. The sensor is excited near the lever resonance by an external piezoelectric oscillator. Induced charge from the piezoelectric layer, which varies linearly with the lever amplitude, is detected for the feedback signal of an SFM. In this paper, we present a surface image of a 1 μm pitch grating, which was obtained by a dynamic SFM using the sensor in cyclic contact mode.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
