Self-assembled millimeter-wave helical antenna

Abstract

Microfabrication techniques allow creation of antennas for mm-wave frequencies such as 60 GHz and beyond. This is because of the mechanical precision required. Another advantage of microfabrication is the ability to batch-process a large quantity of antennas, also enabling electrically large arrays. We present a usage of a unique micro-electro-mechanical systems (MEMS) fabrication process which incorporates self-assembly to achieve helical on-chip antennas. By using self-assembly, even mechanically complex helical antennas can be designed and fabricated with ease. The design method, physical prototypes, and the simulated performance of 60 GHz helical antennas are presented. This enables single-port on-chip antennas with circular polarization, or on-chip arrays for circular polarization.