Self-sustained low pressure glow discharge with a hollow cathode at currents of tens of amperes

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Self-sustained glow discharge with a hollow cathode was studied at high discharge currents (up to 30 A). Using a grid analyzer placed on the side flange of the hollow cathode, the ion and electron currents flowing in the cathode sheath were measured. At a discharge current of 30 A, pressure of 0.2–2 Pa, and plasma density of 1011 cm−3, the coefficient of secondary ion-electron emission λ calculated from the experimental data is found to be 0.1–0.15. The dependences of the plasma parameters on the area of the small anode placed inside the larger hollow cathode are determined.