Abstract

Preparing multifunctional 3D microstructures in transparent materials, such as phase plates, light attenuators, and metasurfaces, is critical in science and technology. Here, the self-organized micro-gratings were created inside the z-cut LiNbO3 using slit-shaped femtosecond laser direct writing. The effects of the processing parameters and slit widths on the micro-grating’s formation are investigated. The Raman mapping, energy dispersive spectroscopy, and the micro polariscope are adopted to understand the general mechanism of periodic gratings’ generation. An optical attenuator with a spacing of 15 μm was fabricated to demonstrate the potential of micro-grating. The attenuator showed the max attenuation (about 45 %) at 633 nm, indicating the potential application of micro-gratings in optical information processing. The micro-gratings provide a pathway for expanding the applications of LiNbO3 and fabricating multifunctional photonic structures.

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