Abstract
This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.
Highlights
Application of ultrasonic transducers for sensing has become popular among multiple areas that include sensing of various physical, chemical, and biochemical phenomena
Among the arguments towards CMU-based selective ultrasonic gravimetric sensor (SUGS), which are presented in this review, another important factor deciding the practical value of different gravimetric detection systems is the ratio between detectable mass and active surface area
NEMS-based gravimetric detection devices are nanometer sized resonant structures designed for resonant characterization in nanometer scale, capable of sensing extremely small changes in mass
Summary
Application of ultrasonic transducers for sensing has become popular among multiple areas that include sensing of various physical, chemical, and biochemical phenomena. Sensors 2020, 20, 3554 properties that describe the performance: sensitivity, the limit of detection, and cross-selectivity. MEMS elements, such as suspended micro membranes, microbridges, and cantilevers, improved some characteristics of chemical transistors and resistors [38], such as power dissipation and the operational temperature ranges When these EMEMS structures are being used as electrochemical sensors in combination with metals, metal oxides, or nanomaterials, response times can be . Ititwas structure andand using the the proper sensing materials is possible to overcome many drawbacks of other the other technologies in proper sensing materials it is itpossible to overcome many drawbacks of the technologies in the the device properties such as sensitivity, cross-selectivity, and limit of detection. Gas sensors that device properties such as sensitivity, cross-selectivity, and limit of detection.
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