Selective Plating on Photopatterned Titanium Oxide Films

Abstract

A method for direct formation of patterned metal film on glass without resist use or etching was investigated. Palladium, which functions as an initiation catalyst for auto-catalytic metal deposition reactions, was selectively adsorbed onto solution processed nano-porous titanium oxide films on glass from an ionic palladium solution. After selective palladium catalyst grafting onto the titanium oxide, exposure of the films to an electroless nickel, copper or gold plating solution resulted in metal deposition selectively on the titanium oxide surface. Photo-active titanium complex films were photo-patterned then pyrolyzed to give the respective pattern preserved titanium oxide films that could then be selectively plated. Correlations between titanium oxide film characteristic and palladium adsorption were analyzed by ellipsometry and inductively coupled plasma mass spectroscopy. Cross section observation of metalized glass showed penetration of palladium catalyst into and elucidated the structure of plated metal on the patterned titanium oxide films.