Abstract
We have demonstrated the selective area growth of high density InAs quantum dots (QDs) by using site-controlled InAs dots that were formed in the desired regions as templates. The fabrication of the InAs dots for the templates was enabled by the use of a specially designed atomic-force-microscope (AFM) cantilever, referred to as the nano-jet probe (NJP). Using the NJP, two-dimensional (2D) arrays of ordered In nano-dots were reproducibly fabricated in the desired regions on a GaAs substrate. These In nano-dots were directly converted to InAs QD arrays by subsequent annealing with irradiation of arsenic flux. By using the converted QD arrays as strain templates, self-organized InAs QDs were formed in the selected regions.
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