Selective deposition of polycrystalline diamond films using photolithography with addition of nanodiamonds as nucleation centers

V V Okhotnikov,G Yu Nazarova,D V Shashev,V I Yurchenko,S A Linnik,A V Gaidaichuk

doi:10.1088/1757-899x/116/1/012001

Abstract

A new method of selective deposition of polycrystalline diamond has been developed and studied. The diamond coatings with a complex, predetermined geometry and resolution up to 5 μm were obtained. A high density of polycrystallites in the coating area was reached (up to 32·107 pcs/cm2). The uniformity of the film reached 100%, and the degree of the surface contamination by parasitic crystals did not exceed 2%. The technology was based on the application of the standard photolithography with an addition of nanodiamond suspension into the photoresist that provided the creation of the centers of further nucleation in the areas which require further overgrowth. The films were deposited onto monocrystalline silicon substrates using the method of “hot filaments” in the CVD reactor. The properties of the coating and the impact of the nanodiamond suspension concentration in the photoresist were also studied. The potential use of the given method includes a high resolution, technological efficiency, and low labor costs compared to the standard methods (laser treatment, chemical etching in aggressive environments,).

Highlights

Nowadays, the interest to the field of application of various new and better materials in semiconductor electronics is actively growing
Pure diamond is a good electrical insulator, during doping of diamond its specific resistance can change over a wide range from 10 to 106 (Ω·cm), that turns it into a wide-gap semiconductor with a 5.4 eV band gap
This paper proposes a radically different method of growing polycrystalline diamond films, which enables the selective deposition of the films with predetermined parameters of geometry and shape

Summary

Introduction

The interest to the field of application of various new and better materials in semiconductor electronics is actively growing. The use of synthetic diamond enables to simplify the process and to reduce its cost, but its manufacture still requires high-purity diamond substrates, and crystal growth is very limited in size and geometry.

Results

Conclusion