Abstract

A tapered thickness profile and a high thickness enhancement ratio of 3.5 in the waveguide which are necessary for a narrow beam have been realized by selective-area metalorganic chemical vapor deposition (MOCVD) growth using a tapered shape twin mask. A multiple quantum well (MQW) active layer with high strain of 0.9% which is effective for a low threshold current has also been successfully grown by the control of the compositional modulation of InGaAsP in the selective-area growth. Using these techniques, a narrow beam and a low threshold current have been realized for a 1.3 μm laser diode monolithically integrated with a tapered thickness waveguide lens.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call