Abstract
Abstract The current plasma concentration control algorithm of plasma power supply has some problems, such as being easily disturbed by the outside world, low tracking control speed, and difficulty in adjusting the appropriate control parameters. In this paper, an improved single-neuron fuzzy PID control algorithm based on LQR is proposed. The learning process of neurons is optimized by introducing a quadratic performance index, and the scale coefficient K is adjusted by fuzzy control. The feasibility of the control algorithm and its advantages compared with other PID controllers are verified by MATLAB discrete simulation and real machine experiments. The results show that the PID control algorithm designed in this paper can reduce the steady-state deviation and overshoot, shorten the adjustment time, and eliminate the adjustment shock, thus significantly improving the processing effect.
Published Version
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