Abstract
The Seebeck coefficient of heavily-nitrogen-doped n-type polycrystalline 3C-SiC (n-SiC) and platinum (Pt) thin films has been measured from room temperature up to 300 °C by using a microfabricated test structure. At room temperature, the absolute Seebeck coefficient of the n-SiC is -10 μV/°C. With ambient temperature increase, the absolute Seebeck coefficient of the n-SiC is found to gradually increase, reaching -20 μV/°C at 300 °C.
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