Abstract
SUMMARYThe first‐order finite element method (FOFEM) has been widely used in computing electrostatic and magnetic fields of lenses and deflectors. With the increasing requirement of high‐accuracy field computation and the advances in the power of computers, the second‐order finite element method (SOFEM), which will be demonstrated in this paper to be more accurate than FOFEM, is becoming necessary and practical. In this paper, the concept of SOFEM will be described. Several applications of SOFEM in charged particle optics will also be illustrated, such as the simulation of electrostatic and magnetic lenses and deflectors, the modelling of electron and ion sources, and the evaluation of high‐order geometric and chromatic aberrations of charged particle columns.
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