Abstract
The technique of Secondary Ion Mass Spectrometry (SIMS) is analyzed for its capabilities of monitoring layered structures. Primary ion beam current and secondary ion species are varied in order to minimize interface phenomena due to changes in ionization efficiences. It is noted that the choice of primary ion beam current can be particularly important when an oxygen bleed is used. Layer profiles are shown to become more complex when a secondary cluster ion is monitored instead of the monoatomic ion for species detection. With nitrogen as an example, quantitative analysis using cluster ions containing three or more atoms is shown to be extremely difficult, particularly when no oxygen bleed is used.
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