An investigation of the beam damage effect on in situ liquid secondary ion mass spectrometry analysis.

Abstract

During in situ liquid secondary ion mass spectrometry (SIMS) analysis, the primary ion beam is normally scanned on a very small area to collect signals with high ion doses (1014 to 1016 ions/cm2 ). As a result, beam damage may become a concern when compared with the static limit of SIMS analysis, in which the dose is normally less than 1012 ions/cm2 . Therefore, a comparison of ion yields in in situ liquid SIMS analysis versus traditional static SIMS analysis of corresponding dry samples is of great interest. In this study, a dipalmitoylphosphatidylcholine (DPPC) liposome solution was used as a model system. Both liquid sample and dry sample were examined. Secondary ion yields using three primary ion species (Bi+ , Bi3+ and Bi3++ ) with various beam currents were investigated. Usable ion yields for both positive and negative characteristic signals (including molecular ions and characteristic fragment ions) were achievable based on optimized experimental conditions for in situ liquid SIMS analysis. The ion yield of the key DPPC molecular ion was comparable to that of traditional static SIMS, and unexpected low fragmentation was observed. The flexible structure of the liquid plays an important role for these observations. Therefore, beam damage may not be a concern in in situ liquid SIMS analysis if proper experimental conditions are used.