Secondary Extinction Used in Thickness and Pole Density Measurements of Textured Films by X-Ray Diffraction

Abstract

A new X-ray diffraction method for a more accurate determination of film thickness and pole densities is developed by introducing a secondary extinction correction. For the purpose an equation based on the kinematic theory of X-ray diffraction and the mosaic crystal model has been derived. The discussion of results shows that the correct characterization of textured films requires in general the secondary extinction to be taken into account.