Abstract
AbstractWe demonstrate the surface potential sensitivity of secondary electron (SE) imaging of titania thin film by scanning electron microscopy (SEM), and discuss the image formation mechanism. The 1‐nm titania film on Si substrate was imaged as bright region against the substrate. The SE image of the film varied with SE detector, but did not with primary electron energy. The contrast of the film was reversed by only 1‐nm carbon deposition. This result suggests that a slight change of surface potential altered the efficiency of secondary electron emission. This high sensitivity of secondary electrons to the surface potential is promising for improvement of thin‐film observation by SEM. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
