Abstract
The authors report on the measurement of the second order nonlinear optical properties of ZnO films deposited by low temperature radio frequency sputtering on ZnO:Al coated glass substrates. They show that ZnO:Al plays a crucial role as a buffer layer for the successive growth of ZnO. The effect of aluminum doping on the relaxation of the stresses acts as a template for crystallization of ZnO, allowing us to obtain partially oriented ZnO films with relatively large nonlinear coefficients. The measurements of the second harmonic tensor by the Maker fringes method are in good agreement with results for the electro-optic coefficient obtained by nonlinear ellipsometry.
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