Abstract

Pure and Fe-doped Pb(Zr0.53Ti0.47)O3 (PZT) thin film capacitors were fabricated by the sol–gel method and the leakage current versus voltage characteristics of these films were investigated at several temperatures and initial polarization states. After the initial poling of ferroelectric thin films, we measured two kinds of leakage current: (i) the full-switching current measured against an initial polarization direction and (ii) the nonswitching current measured toward an initial polarization direction. In the case of the full-switching current measurement, the anomaly of leakage current due to the switching of space charges was observed, which we suggest to be accumulated at a Schottky barrier region near an electrode or a gain boundary. In the case of the nonswitching current measurement, the Schottky diode rectifier current and the field-enhanced Schottky (ES) emission current came out without the switching current. The Poole–Frenkel emission process was dominant over ES emission for a Fe-doped PZT thin film having a large amount of space charge and traps. The height of the Schottky barrier in a Au/PZT film/Pt capacitor was measured to be 0.64 eV.

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