Scheduling of wafer test processes in semiconductor manufacturing

Abstract

This research focuses on solving a common wafer test scheduling problem in semiconductor manufacturing. During wafer testing, a series of test processes are conducted on wafers using computer-controlled test stations at various temperatures. The test processes are conducted in a specified order on a wafer lot, resulting in precedence constraints for the schedule. Furthermore, the assignment of the wafer lots to test stations and the sequence in which they are processed affects the time required to set up the test operations. Thus, the set-up times are sequence dependent. Four heuristics are developed to solve the test scheduling problem with the aim of minimizing the makespan required to test all wafers on a set of test stations. The heuristics generate a sorted list of wafer lots as a dispatching sequence and then schedule the wafer lots on test stations in order of appearance on the list. An experimental analysis and two case studies are presented to validate the proposed solution approaches. In the case studies, the heuristics are applied to actual data from a semiconductor manufacturing facility. For both case studies, the proposed solution approaches decrease the makespan by 23–45% compared with the makespan of the actual schedule executed in the manufacturing facility.