Abstract
A compact scanning tunneling microscope (STM) with a novel rotary piezoelectric stepping motor for coarse positioning has been developed. An inertial method for rotating of the rotor by the pair of piezoplates has been used in the piezomotor. Minimal angular step size was about several arcsec with the spindle working torque up to 1 N×cm. Design of the STM was noticeably simplified by utilization of the piezomotor with such small step size. A shaft eccentrically attached to the piezomotor spindle made it possible to push and pull back the cylindrical bush with the tubular piezoscanner. A linear step of coarse positioning was about 50 nm. STM resolution in vertical direction was better than 0.1 nm without an external vibration isolation.
Published Version
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